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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 28, Issue 3, 2010, Pages 522-526

Aligned dense single-walled carbon nanotube beams and cantilevers for nanoelectromechanical systems applications

(4) Lu, Miao a Jang, Min Woo a Campbell, Stephen A a Cui, Tianhong a

a University of Minnesota (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOSENSORS; CARBON NANOTUBES; ELECTROPHORESIS; NANOCANTILEVERS; NEMS;

ALIGNED SINGLE-WALLED CARBON NANOTUBES; DIELECTROPHORESIS; FABRICATION PROCESS; NANO ELECTROMECHANICAL SYSTEMS; NANO SCALE; NEMS DEVICES; PROCESSABLE; PROTOTYPING; PULL-IN VOLTAGE;

SINGLE-WALLED CARBON NANOTUBES (SWCN);

EID: 77952960949 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3377142 Document Type: Conference Paper

Times cited : (4)

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