Diamond-like carbon for MEMS

Journal of Micromechanics and Microengineering

Volumn 17, Issue 7, 2007, Pages

  Peiner, Erwin ^a   Tibrewala, Arti ^a   Bandorf, Ralf ^b   Lüthje, Holger ^b   Doering, Lutz ^c   Limmer, Wolfgang ^d  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

^c PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^d UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC ETCHING; CARBON; ELASTIC MODULI; SILICON COMPOUNDS; SPUTTER DEPOSITION;

ANISOTROPIC SILICON ETCHING; GRADIENT FRACTURE STRENGTH; LIFT-OFF PATTERNING; SELF SUPPORTING CANTILEVERS;

MEMS;

EID: 34547590137     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/7/S04     Document Type: Article

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