Fabrication of 1 inch mosaic crystal diamond wafers

Applied Physics Express

Volumn 3, Issue 5, 2010, Pages

  Yamada, Hideaki ^a   Chayahara, Akiyoshi ^a   Mokuno, Yoshiaki ^a   Umezawa, Hitoshi ^a   Shikata, Shin Ichi ^a   Fujimori, Naoji ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND WAFERS; LIFT-OFF PROCESS; MOSAIC CRYSTALS; SEED CRYSTAL;

CRYSTALS; GRAIN BOUNDARIES; ION IMPLANTATION;

DIAMONDS;

EID: 77952749627     PISSN: 18820778     EISSN: 18820786     Source Type: Journal    
DOI: 10.1143/APEX.3.051301     Document Type: Article

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