MEMS: A practical guide of design, analysis, and applications

MEMS: A Practical Guide of Design, Analysis, and Applications

Volumn , Issue , 2006, Pages 1-965

  Korvink, Jan G ^a   Paul, Oliver ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

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[No Author keywords available]

Indexed keywords

EID: 74049129611     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/978-3-540-33655-6     Document Type: Book

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