Use of the focused ion beam technique to produce a sharp spherical diamond indenter for sub-10 nm nanoindentation measurements

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 2, 2004, Pages 668-672

  Yu, Ning ^a   Polycarpou, Andreas A ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; GEOMETRY; HARDNESS; INDENTATION; ION BEAMS; MILLING (MACHINING); PLASTIC DEFORMATION; QUARTZ; WEAR OF MATERIALS;

DIAMOND INDENTER; FOCUSED ION BEAM MILLING METHOD; ION MILLING PATTERNING; NANOINDENTATION; PLASTIC CONTACT;

DIAMONDS;

EID: 2342636422     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1676467     Document Type: Article

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