Nano-electromechanical displacement sensing based on single-walled carbon nanotubes

Nano Letters

Volumn 6, Issue 7, 2006, Pages 1449-1453

  Stampfer, C ^a   Jungen, A ^a   Linderman, R ^a,c   Obergfell, D ^b   Roth, S ^b   Hierold, C ^a  

^a ETH ZURICH   (Switzerland)

^b MAX PLANCK INSTITUT FÜR FESTKÖRPERFORSCHUNG   (Germany)

^c IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTANCE; ELECTRIC RESISTANCE; ELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; PIEZOELECTRIC DEVICES;

METAL CANTILEVER; NANO-ELECTROMECHANICAL DISPLACEMENT; RESISTANCE SENSITIVITY; SINGLE WALLED CARBON NANOTUBES (SWCN);

CARBON NANOTUBES;

CARBON NANOTUBE;

ARTICLE; CHEMISTRY; ELECTROCHEMISTRY; MECHANICAL STRESS; SCANNING ELECTRON MICROSCOPY;

ELECTROCHEMISTRY; MICROSCOPY, ELECTRON, SCANNING; NANOTUBES, CARBON; STRESS, MECHANICAL;

EID: 33746889761     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl0606527     Document Type: Article

References (34)

1. Book Series Advanced Micro & Nanosystems; Baltes, H., Brand, O., Fedder, G. K., Hierold, C., Korvink, J. G., Tabata, O., Eds.; Wiley-VCH: Weinheim, 2004-2006.
2. Cha, S. N.; Jang, J. E.; Choi, Y.; Amaratunga, G. A. J.; Kang, D.-J.; Hasko, D. G.; Jung, J. E.; Kim, J. M. Fabrication of a nanoelectro-mechanical switch using a suspended carbon nanotube. Appl. Phys. Lett. 2005, 86, 083105.
3. Stampfer, C.; Helbling, T.; Obergfell, D.; Schöberle, B.; Tripp, M. K.; Jungen, A.; Roth, S.; Bright, V. M.; Hierold, C. Fabrication of single-walled-carbon-nanotube-based pressure sensors. Nano Lett. 2006, 6 (2), 233-237.
4. Nishio, M.; Sawaya, S.; Akita, S.; Nakayama, Y. Carbon nanotube oscillators toward zeptogram detection. Appl. Phys. Lett. 2005, 86, 133111.
5. Craighead, H. G. Nanoelectromechanical Systems. Science 2000, 290, 1532-1535.
6. Roukes, M. L. Nanoelectromechanical Systems; Technical Digest of the 2000 Solid-State Sensor and Actuator Workshop, Hilton Head Isl., SC, 6/4-8/2000.
7. Lefèvre, R.; Goffman, M. F.; Derycke, V.; Miko, C.; Forró, L.; Bourgoin, J. P.; Hesto, P. Scaling Law in Carbon Nanotube Electromechanical Devices. Phys. Rev. Lett. 2005, 95, 185504.
8. Schwab, K. C.; Roukes, M. L. Putting Mechanics into Quantum Mechanics; Phys. Today 2005, July, 36.
9. Hierold, C. From Micro to Nano Systems: Mechanical Sensors go Nano. J. Micromech. Microeng. 2004, 14, 1-11.
10. Jungen, A.; Stampfer, C.; Hoetzel, J.; Bright, V.; Hierold, C. Process integration of carbon nanotubes into microelectromechanical systems. Sens. Actuators, A, in press.
11. Carbon Nanotubes: Synthesis, Structure, Properties and Applications; Dresselhaus, M. S., Dresselhaus, G., Avouris, P., Eds.; Springer; Berlin, 2001; Vol. 80.
12. Reich, S.; Thomsen, C.; Maultzsch, J. Carbon Nanotubes; Wiley-VCH: Weinheim, 2003.
13. Iijiama, S.; Ichihashi, T. Single-shell carbon nanotubes of 1-nm diameter. Nature 1993, 363, 603-605.
14. Cao, J.; Wang, Q.; Dai, H. Electromechanical properties of metallic, quasimetallic, and semiconducting carbon nanotubes under stretching. Phys. Rev. Lett. 2003, 90, 157601-157604.
15. Grow, R. J.; Wang, Q.; Cao, J.; Wang, D.; Dai, H. Piezoresistance of carbon nanotubes on deformable thin-film membranes. Appl. Phys. Lett. 2005, 86, 093104.
16. Tombler, T. W.; Zhou, C.; Alexseyev, L.; Kong, J.; Dai, H.; Liu, L.; Jayanthi, C. S.; Tang, M.; Wu, S. Reversible electromechanical characteristics of carbon nanotubes under local-probe manipulation. Nature 2000, 405, 769-772.
17. Minot, E. D.; Yaish, Y.; Sazonova, V.; Park, J.-Y.; Brink, M.; McEuen, P. L. Tuning carbon nanotube band gaps with strain. Phys. Rev. Lett. 2003, 90, 156401-156404.
18. Maiti, A.; Svizhenko, A.; Anantram, M. P. Electronic Transport through carbon nanotubes: Effects of structural deformation and tube chirality. Phys. Rev. Lett. 2002, 88, 1268051-1268054.
19. Yang, L.; Anantram, M. P.; Han, J.; Lu, J. P. Band-gap change of carbon nanotubes: Effect of small uniaxial and torsional strain. Phys. Rev. B 1999, 60, 13874.
20. Yu, M.-F.; Files, B. S.; Arepalli, S.; Ruoff, R. S. Tensile Loading of Ropes of Single Wall Carbon Nanotubes and their Mechanical Properties. Phys. Rev. Lett. 2000, 84, 5552.
21. Wautelet, Michel Scaling laws in the macro-, micro- and nanoworlds. Eur. J. Phys. 2001, 22, 601-611.
22. Stampfer, C.; Jungen, A.; Hierold, C. Fabrication of discrete carbon nanotube based nano-scaled force sensors. IEEE Sens. 2004 2004, T4L-F.5, 1056-1059.
23. Stampfer, C.; Jungen, A.; Hierold, C. Single Walled Carbon Nanotubes as Active Elements in Nano Bridge Based NEMS. IEEE Conf. Nanotechnoi, 5th 2005.
24. Stampfer, C.; Jungen, A.; Hierold, C. Nano Electromechanical Transducers based on Single Walled Carbon Nanotubes. Int. Conf. Solid-State Sens., Actuators Microsyst., 13th 2005, 2103-2106.
25. Stampfer, C.; Jungen, A.; Hierold, C. Single Walled Carbon Nanotubes as Active Elements in Nanotransducers; XVII International Winterschool/ Euroconference on Electronic Properties of Novel Materials; Kuzmany, H., Fink, J., Mehring, M., Roth, S., Eds.; AIP Conf. Proc. 2005, 786, 616-619.
26. Stampfer, C.; Jungen, A.; Hierold, C. Fabrication of Discrete Nano-Scaled Force Sensors Based on Single Walled Carbon Nanotubes. IEEE Sens. J., in press.
27. Cleland, A. N. Foundations of Nanomechanics; Springer: Berlin, 2003.
28. Landau, L. D.; Lifshitz, E. M. Theory of Elasticity; Pergamon Press: New York, 1970.
29. Kovacs, G. Micromachined Transducers Sourcebook; WCB, McGraw-Hill: Boston, 1998.
30. Johnson, J. B. Phys. Rev. 1928, 32, 97.
31. Nyquist, H. Phys. Rev. 1928, 32, 110.
32. Postma, H. W. Ch.; Teepen, T. F.; Yao, Z.; Dekker, C. 1/f noise in carbon nanotubes. In Proc. Rencontres Moriond, 36th 2001.
33. Collins, P. G.; Fuhrer, M. S.; Zettl, A. 1/f noise in carbon nanotubes. Appl. Phys. Lett. 2000, 76, 894-896.
34. Geen, J. A.; Sherman, S. J.; Chang, J. F.; Lewis, S. R. Single-Chip surface Micromachined Integrated Gyroscope With 50°/h Allan Deviation. IEEE J. Solid-Sate Circuits 2002, 37, 1860.