Nanocrystalline diamond formation by using an inductively coupled radio-frequency CH4/H2/Ar plasma

Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 446-450

  Ikada, Reijiro ^a   Iizuka, Satoru ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Diamond crystal; Nanocrystalline diamond; Plasma CVD; Synthetic diamond

Indexed keywords

ARGON; HYDROGEN; METHANE; MIXING; PLASMAS; RAMAN SCATTERING; SYNTHETIC DIAMONDS;

DIMOND CRYSTALS; NANOCRYSTALLINE DIAMOND; PLASMA CVD;

NANOSTRUCTURED MATERIALS;

EID: 18444378747     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.12.035     Document Type: Conference Paper

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