Process integration of carbon nanotubes into microelectromechanical systems

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 588-594

  Jungen, Alain ^a   Stampfer, Christoph ^a   Hoetzel, Jochen ^a   Bright, Victor M ^b   Hierold, Christofer ^a  

^a ETH ZURICH   (Switzerland)

^b UCB 450   (United States)

Author keywords

Carbon nanotubes; MEMS; Nanotechnology; Nanotube growth; NEMS; Process integration

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROPROCESSOR CHIPS; NANOTECHNOLOGY; POLYSILICON; TRANSDUCERS;

NANOTUBE GROWTH; NEMS; PROCESS INTEGRATION;

CARBON NANOTUBES;

EID: 33745822022     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.12.019     Document Type: Article

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