Application of scanning capacitancemicroscopy to analysis at the nanoscale

NanoScience and Technology

Volumn 0, Issue , 2008, Pages 377-420

  Lányi, Štefan ^a  

^a Slovakian Academy o Sciences   (Slovakia)

Author keywords

Analysis of dielectric films; Deep level transient spectroscopy; Impedance spectroscopy; Isothermal charge transient spectroscopy; Scanning capacitance microscopy; Semiconductor analysis

Indexed keywords

EID: 77950929353     PISSN: 14344904     EISSN: 21977127     Source Type: Book Series    
DOI: 10.1007/978-3-540-74080-3_11     Document Type: Article

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