On calculating scanning capacitance microscopy data for a dopant profile in semiconductors

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 1, 2004, Pages 411-416

  Marchiando, J F ^a   Kopanski, J J ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; BOUNDARY CONDITIONS; CAPACITANCE; COMPUTER SOFTWARE; FINITE ELEMENT METHOD; INVERSE PROBLEMS; ION IMPLANTATION; MICROSCOPIC EXAMINATION; PERMITTIVITY; POISSON EQUATION; SCANNING;

DIRICHLET BOUNDARY CONDITIONS; SCANNING CAPACITANCE MICROSCOPY (SCM);

SEMICONDUCTOR DOPING;

EID: 1642377988     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1619422     Document Type: Conference Paper

References (18)

1. International Technology Roadmap for Semiconductors, 1999 ed. (Semiconductor Industry Association, San Jose, CA, 1999), p. 304. See also URL: http://public.itrs.net.
2. M. Melliar-Smith and A. C. Diebold, AIP Conf. Proc. 449, 3 (1998).
3. M. Duane, AIP Conf. Proc. 449, 715 (1998).
4. Y. Huang, Doctoral dissertation, Department of Physics, University of Utah, Salt Lake City, UT, 1995.
5. Y. Huang and C. C. Williams, Appl. Phys. Lett. 66, 344 (1995).
6. Y. Huang, C. C. Williams, and J. Slinkman, J. Vac. Sci. Technol. B 14, 433 (1996).
7. J. S. McMurray and C. C. Williams, AIP Conf. Proc. 449, 731 (1998).
8. J. S. McMurray, J. Kim, C. C. Williams, and J. Slinkman, J. Vac. Sci. Technol. B 16, 344 (1998).
9. J. J. Kopanski, B. G. Rennex, and J. F. Marchiando, Semiconductor Measurement Technology: FASTC2D, Version 1: Software for Extracting Two-Dimensional Carrier Profiles from Scanning Capacitance Microscope Images of Doped Silicon (NIST Spec. Publ., National Institute of Standards and Technology, U.S. Department of Commerce, Washington, D.C., in preparation, 2004).
10. J. F. Marchiando, J. J. Kopanski, and J. R. Lowney, J. Vac. Sci. Technol. B 16, 463 (1998).
11. G. M. Yu, P. B. Griffin, and J. D. Plummer, Tech. Dig. - Int. Electron Devices Meet. 1998, 717.
12. M. L. O'Malley, G. L. Timp, S. V. Moccio, J. P. Garno, and R. N. Kleiman, Appl. Phys. Lett. 74, 272 (1999).
13. J. J. Kopanski, in The Encyclopedia of Imaging Science and Technology (Wiley, New York, 2002), pp. 16-31.
14. J. F. Marchiando and J. J. Kopanski, J. Appl. Phys. 92, 5798 (2002), see Appendix A.
15. J. D. Jackson, Classical Electrodynamics, 2nd ed. (Wiley, New York, 1975).
16. R. E. Bank, PLTMG: A Software Program for Solving Elliptic Partial Differential Equations, Users' Guide 8.0 (Society for Industrial and Applied Mathematics, Philadelphia, 1998).
17. J. F. Marchiando, J. Res. Natl. Inst. Stand. Technol. 100, 661 (1995).
18. J. F. Marchiando, Int. J. Numer. Methods Eng. 39, 1029 (1996). This is a shortened form of the preceding reference.