Demonstration of an electrostatic-shielded cantilever

Applied Physics Letters

Volumn 88, Issue 4, 2006, Pages 1-3

  Pingue, P ^a   Piazza, V ^a   Baschieri, P ^a   Ascoli, C ^a   Menozzi, C ^b   Alessandrini, A ^b   Facci, P ^b  

^a CNR   (Italy)

^b CNR Consiglio Nazionale delle Ricerche   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; DEPOSITION; ELECTRODES; METALS; MICROSCOPIC EXAMINATION; OXIDATION; PROBES;

ELECTROSTATIC-SHIELDED CANTILEVER; METAL DEPOSITION; PARASITIC CAPACITANCE;

ELECTRIC SHIELDING;

EID: 31544446089     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2168247     Document Type: Article

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