Carrier distribution in quantum nanostructures by scanning capacitance microscopy

Journal of Applied Physics

Volumn 97, Issue 1, 2005, Pages

  Giannazzo, F ^a   Raineri, V ^a   La Magna, A ^a   Mirabella, S ^b   Impellizzeri, G ^b   Piro, A M ^b   Priolo, F ^b   Napolitani, E ^c   Liotta, S F ^d  

^a CNR IMM   (Italy)

^b UNIVERSITY OF CATANIA   (Italy)

^c UNIVERSITY OF PADOVA   (Italy)

^d STMICROELECTRONICS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER DISTRIBUTION; QUANTITATIVE INFORMATION; SCANNING CAPACITANCE MICROSCOPY (SCM); SIGNAL SENSITIVITY; SPATIAL RESOLUTION;

CARRIER CONCENTRATION; CHEMICAL ANALYSIS; COMPUTER SIMULATION; DATA REDUCTION; HETEROJUNCTIONS; QUANTUM THEORY; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR QUANTUM WELLS; SENSITIVITY ANALYSIS; SIGNAL PROCESSING;

NANOSTRUCTURED MATERIALS;

EID: 19944434092     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1827342     Document Type: Article

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