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Volumn 78, Issue 5, 2001, Pages 613-615

Variable-temperature scanning capacitance microscopy: A way to probe charge traps in oxide or semiconductor

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EID: 0010059470 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1339992 Document Type: Article

Times cited : (10)

References (14)

1
- 0033698091
- P. De Wolf, R. Stephenson, T. Trenkler, T. Clarysse, T. Hantschel, and W. Vandervorst, J. Vac. Sci. Technol. B 18, 361 (2000).
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 361
- De Wolf, P.¹ Stephenson, R.² Trenkler, T.³ Clarysse, T.⁴ Hantschel, T.⁵ Vandervorst, W.⁶

2
- 0031706388
- J. S. McMurray, J. Kim, and C. C. Williams, J. Vac. Sci. Technol. B 16, 344 (1998).
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 344
- McMurray, J.S.¹ Kim, J.² Williams, C.C.³

3
- 0000849397
- G. Neubauer, A. Erickson, C. C. Williams, J. J. Kopanski, M. Rodgers, and D. Adderton, J. Vac. Sci. Technol. B 14, 426 (1996).
- (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 426
- Neubauer, G.¹ Erickson, A.² Williams, C.C.³ Kopanski, J.J.⁴ Rodgers, M.⁵ Adderton, D.⁶

4
- 0031571922
- C. J. Kang, C. K. Kim, J. D. Lera, Y. Kuk, K. M. Mang, J. G. Lee, K. S. Suh, and C. C. Williams, Appl. Phys. Lett. 71, 1546 (1997).
- (1997) Appl. Phys. Lett. , vol.71 , pp. 1546
- Kang, C.J.¹ Kim, C.K.² Lera, J.D.³ Kuk, Y.⁴ Mang, K.M.⁵ Lee, J.G.⁶ Suh, K.S.⁷ Williams, C.C.⁸

5
- 0032615491
- C. J. Kang, G. H. Buh, S. Lee, C. K. Kim, K. M. Mang, C. Im, and Y. Kuk, Appl. Phys. Lett. 74, 1815 (1999).
- (1999) Appl. Phys. Lett. , vol.74 , pp. 1815
- Kang, C.J.¹ Buh, G.H.² Lee, S.³ Kim, C.K.⁴ Mang, K.M.⁵ Im, C.⁶ Kuk, Y.⁷

6
- 0016081559
- D. V. Lang, J. Appl. Phys. 45, 3023 (1974).
- (1974) J. Appl. Phys. , vol.45 , pp. 3023
- Lang, D.V.¹

7
- 0348035882
- K. Yamasaki and T. Sugano, Appl. Phys. Lett. 35, 932 (1979).
- (1979) Appl. Phys. Lett. , vol.35 , pp. 932
- Yamasaki, K.¹ Sugano, T.²

8
- 0020298671
- edited by B. R. Appleton and G. K. Celler North-Holland, New York
- J. L. Benton, G. K. Celler, D. C. Jacobson, L. C. Kimerling, D. J. Lischner, G. L. Miller, and Mc. D. Robinson, in Laser and Electron-Beam Interactions with Solids, edited by B. R. Appleton and G. K. Celler (North-Holland, New York, 1982), p. 765.
- (1982) Laser and Electron-Beam Interactions with Solids , pp. 765
- Benton, J.L.¹ Celler, G.K.² Jacobson, D.C.³ Kimerling, L.C.⁴ Lischner, D.J.⁵ Miller, G.L.⁶ Robinson, McD.⁷

9
- 0001144112
- D. N. Davydov, K. B. Shelimov, T. L. Haslett, and M. Moskovits, Appl. Phys. Lett. 75, 1796 (1999).
- (1999) Appl. Phys. Lett. , vol.75 , pp. 1796
- Davydov, D.N.¹ Shelimov, K.B.² Haslett, T.L.³ Moskovits, M.⁴

10
- 0001576878
- H. Tomiye, T. Yao, H. Kawami, and T. Hayashi, Appl. Phys. Lett. 69, 4050 (1996).
- (1996) Appl. Phys. Lett. , vol.69 , pp. 4050
- Tomiye, H.¹ Yao, T.² Kawami, H.³ Hayashi, T.⁴

11
- 36449002581
- J.-K. Leong and C. C. Williams, Appl. Phys. Lett. 66, 1432 (1995).
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1432
- Leong, J.-K.¹ Williams, C.C.²

12
- 36549100702
- C. C. Williams, J. Slinkman, W. P. Hogh, and H. K. Wickramasinghe, Appl. Phys. Lett. 55, 1662 (1989).
- (1989) Appl. Phys. Lett. , vol.55 , pp. 1662
- Williams, C.C.¹ Slinkman, J.² Hogh, W.P.³ Wickramasinghe, H.K.⁴

13
- 0033697212
- J. J. Kopanski, J. F. Marchiando, and B. G. Rennex, J. Vac. Sci. Technol. B 18, 409 (2000).
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 409
- Kopanski, J.J.¹ Marchiando, J.F.² Rennex, B.G.³

14
- 85033300919
- Technology Modeling Associates, Inc., 595 Lawrence Expressway, Sunnyvale, CA 94086-3922, versions 6 and 2.1
- Computer code TSUPREM-4 and MEDICT (Technology Modeling Associates, Inc., 595 Lawrence Expressway, Sunnyvale, CA 94086-3922, versions 6 and 2.1).
- Computer Code TSUPREM-4 and MEDICT

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