Quantitative measurement of two-dimensional dopant profile by cross-sectional scanning capacitance microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 4, 1997, Pages 1011-1014

  McMurray, J S ^a   Kim, J ^a   Williams, C C ^a  

^a UNIVERSITY OF UTAH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001505352     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589385     Document Type: Article

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