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Volumn 83, Issue 2, 1998, Pages 820-825
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Constant-resistance deep-level transient spectroscopy in submicron metal-oxide-semiconductor field-effect transistors
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITANCE MEASUREMENT;
CHARGE CARRIERS;
ELECTRIC RESISTANCE MEASUREMENT;
ELECTRON EMISSION;
FERMI LEVEL;
MOSFET DEVICES;
TEMPERATURE;
TRANSCONDUCTANCE;
SURFACE MOBILITY;
TRAP CONCENTRATION;
DEEP LEVEL TRANSIENT SPECTROSCOPY;
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EID: 0031696456
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.366763 Document Type: Article |
Times cited : (16)
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References (17)
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