Effect of tip shape on capacitance determination accuracy in scanning capacitance microscopy

Ultramicroscopy

Volumn 103, Issue 3, 2005, Pages 221-228

  Lanyi S ^a  

^a INSTITUTE OF PHYSICS   (Slovakia)

Author keywords

Computer simulations; Finite Element Method; Metal insulator interfaces; Scanning capacitance microscopy; Semiconductor insulator interfaces

Indexed keywords

CAPACITANCE; DIELECTRIC FILMS; MEASUREMENT ERRORS; PROBES; SCANNING;

CYLINDRICAL ISLANDS; MICROFABRICATED PROBES; SCANNING CAPACITANCE MICROSCOPY;

MICROSCOPIC EXAMINATION;

ACCURACY; ANALYTICAL ERROR; ARTICLE; ELECTRICITY; SCANNING CAPACITANCE MICROSCOPY; SCANNING ELECTRON MICROSCOPE; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR; STRUCTURE ANALYSIS;

EID: 17844385297     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2004.12.002     Document Type: Article

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