Improved reproducibility in scanning capacitance microscopy for quantitative 2D carrier profiling on silicon

Materials Science and Engineering: B

Volumn 102, Issue 1-3, 2003, Pages 152-155

  Goghero, D ^a   Giannazzo, F ^b   Raineri, V ^a  

^a CNR IMM   (Italy)

^b UNIVERSITY OF CATANIA   (Italy)

Author keywords

Oxidation method; Reliability; Scanning capacitance microscopy; Silicon

Indexed keywords

DOPING (ADDITIVES); OXIDATION; OZONE; RELIABILITY;

CARRIER PROFILING;

SILICON;

EID: 0042012752     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00637-2     Document Type: Conference Paper

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