Scanning capacitance microscopy on ultranarrow doping profiles in Si

Applied Physics Letters

Volumn 83, Issue 13, 2003, Pages 2659-2661

  Giannazzo, F ^a,b   Goghero, D ^b   Raineri, V ^b   Mirabella, S ^a   Priolo, F ^a  

^a UNIVERSITY OF CATANIA   (Italy)

^b CNR IMM   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; MICROSCOPIC EXAMINATION; SCANNING; SEMICONDUCTOR DOPING;

MAGNIFICATION FACTOR;

SEMICONDUCTING SILICON;

EID: 0142089013     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1613032     Document Type: Article

References (6)

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