Imaging conducting surfaces and dielectric films by a scanning capacitance microscope

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 892-896

  Lanyi S ^a   Torok J ^b   Rehurek P ^a  

^a INSTITUTE OF PHYSICS   (Slovakia)

^b SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5544255694     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589169     Document Type: Article

References (10)

1. H. Kumar Wickramasinghe, J. Vac. Sci. Technol. A 8, 363 (1990).
2. J. R. Matey and J. Blanc, J. Appl. Phys. 57, 1437 (1985).
3. C. D. Bugg and P. J. King, J. Phys. E 21, 147 (1988).
4. H. P. Kleinknecht, J. R. Sandercock, and H. Meier, Scanning Microsc. 2, 1839 (1988).
5. C. C. Williams, W. P. Hough, and S. A. Rishton, Appl. Phys. Lett. 55, 203 (1989).
6. Š. Lányi, J. Török, and P. Řehůřek, Rev. Sci. Instrum. 65, 2258 (1994).
7. G. Binnig and H. Rohrer, Helv. Phys. Acta 55, 729 (1982).
8. Š. Lányi and J. Török, J. Elect. Eng. 46, 126 (1995).
9. O. C. Zienkiewicz, The Finite Element Method (Mc Graw-Hill, New York, 1977).
10. W. Langheinrich and H. Beneking, Jpn. J. Appl. Phys. 32, 6218 (1993).