Scanning capacitance microscope methodology for quantitative analysis of p-n junctions

Journal of Applied Physics

Volumn 85, Issue 11, 1999, Pages 7774-7783

  Zavyalov, V V ^a   McMurray, J S ^a   Williams, C C ^a  

^a UNIVERSITY OF UTAH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001508303     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.370584     Document Type: Article

References (17)

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