Characterization of two-dimensional dopant profiles: Status and review

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 1, 1996, Pages 196-201

  Diebold, A C ^a   Kump, M R ^a   Kopanski, J J ^b   Seiler, D G ^b  

^a SEMATECH   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000720788     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589028     Document Type: Article

References (29)

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