The lateral resolution limit for imaging periodic conducting surfaces in capacitive microscopy

Journal of Physics D: Applied Physics

Volumn 33, Issue 22, 2000, Pages 2890-2898

  Bruce, N C ^a   Garcia Valenzuela A ^a   Kouznetsov, D ^b  

^a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

^b Hopelchen M 353 L 13 ^*  (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; CAPACITANCE; ELECTRODES; MATHEMATICAL MODELS; MICROSCOPIC EXAMINATION; SURFACE ROUGHNESS;

CAPACITIVE MICROSCOPY;

CAPACITORS;

EID: 17144454151     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/33/22/305     Document Type: Article

References (10)

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