Quantification of scanning capacitance microscopy imaging of the pn junction through electrical simulation

Applied Physics Letters

Volumn 74, Issue 2, 1999, Pages 272-274

  O'Malley, M L ^a   Timp, G L ^a   Moccio, S V ^a   Garno, J P ^a   Kleiman, R N ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001620949     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123278     Document Type: Article

References (5)

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3. J. J. Kopanski, J. F. Marchiando, and J. R. Lowney, J. Vac. Sci. Technol. B 14, 242 (1996).
4. S. M. Sze, Physics of Semiconductor Devices (Wiley, New York, 1981).
5. M. R. Pinto, C. S. Rafferty, R. K. Smith, and J. Bude, Tech. Dig. Int. Electron Devices Meet., 691 (1997).