The resolution limit of scanning capacitance microscopes

Journal of Physics D: Applied Physics

Volumn 36, Issue 5, 2003, Pages 598-602

  Lányi, Štefan ^a   Hruškovic, Miloslav ^b  

^a INSTITUTE OF PHYSICS   (Slovakia)

^b SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; CAPACITANCE; COMPUTER SIMULATION; ELECTRIC FIELDS; ELECTROSTATICS; FINITE ELEMENT METHOD; GOLD; SILICON; SURFACE STRUCTURE;

INTEGRAL CAPACITANCE; SCANNING CAPACITANCE MICROSCOPE; SOFTWARE PACKAGE MEP 6;

MICROSCOPIC EXAMINATION;

EID: 0037423960     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/36/5/326     Document Type: Article

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