Sub-10 nm lateral spatial resolution in scanning capacitance microscopy achieved with solid platinum probes

Review of Scientific Instruments

Volumn 75, Issue 2, 2004, Pages 422-425

  Bussmann, E ^a   Williams, C C ^a  

^a UNIVERSITY OF UTAH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SCANNING CAPACITANCE MICROSCOPY (SCM); SEMICONDUCTOR DEPLETION EFFECTS;

ATOMIC FORCE MICROSCOPY; CAPACITANCE; COMPUTER SIMULATION; DIELECTRIC FILMS; FIELD EFFECT TRANSISTORS; METAL INSULATOR BOUNDARIES; MICROSCOPIC EXAMINATION; MIS DEVICES; PLATINUM; SEMICONDUCTOR MATERIALS; SENSORS;

ATOMIC PHYSICS;

EID: 1542572704     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1641161     Document Type: Article

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