Electrical simulation of scanning capacitance microscopy imaging of the pn junction with semiconductor probe tips

Applied Physics Letters

Volumn 74, Issue 24, 1999, Pages 3672-3674

  O'Malley, M L ^a   Timp, G L ^a   Timp, W ^a   Moccio, S V ^a   Garno, J P ^a   Kleiman, R N ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DEPOSITION; ION IMPLANTATION; MICROSCOPIC EXAMINATION; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING;

SCANNING CAPACITANCE MICROSCOPY; SOFTWARE PACKAGE PADRE; SOFTWARE PACKAGE PROPHET;

SEMICONDUCTOR JUNCTIONS;

EID: 0032606603     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123217     Document Type: Article

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