Quantitative two-dimensional dopant profiling of abrupt dopant profiles by cross-sectional scanning capacitance microscopy

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 3, 1996, Pages 1168-1171

  Huang, Y ^a   Williams, C C ^a   Wendman, M A ^b  

^a UNIVERSITY OF UTAH   (United States)

^b Digital Instruments   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000949577     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580260     Document Type: Article

References (13)

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