A review of the preparation of carbon nitride films

Diamond and Related Materials

Volumn 8, Issue 10, 1999, Pages 1809-1830

  Muhl, Stephen ^a   Méndez, Juan Manuel ^a  

^a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

Author keywords

Carbon nitride; Characterisation; Preparation

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; CRYSTALLINE MATERIALS; FILM PREPARATION; HARDNESS; ION BEAMS; LASER APPLICATIONS; SPUTTER DEPOSITION;

ATMOSPHERIC-PRESSURE CHEMICAL PROCESSES; CARBON NITRIDE;

NITRIDES;

EID: 0032692055     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00142-9     Document Type: Review

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