Electron cyclotron resonance assisted chemical vapor deposition of carbon nitride films on diamond

Journal of Applied Physics

Volumn 83, Issue 3, 1998, Pages 1702-1704

  Wu, Kehui ^a   Wang, E G ^a   Qing, Jian ^a   Xu, Guichang ^a  

^a INSTITUTE OF PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005691211     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366887     Document Type: Article

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