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Volumn 6, Issue 5-7, 1997, Pages 631-634

Hard a-C(N):H films obtained from plasma decomposition of methylamine-containing mixtures

Author keywords

Amorphous hydrogenated carbon; Nitrogen; R.f. CVD; Structure

Indexed keywords


EID: 0002022465     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(96)00749-2     Document Type: Article
Times cited : (19)

References (17)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.