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Volumn 6, Issue 5-7, 1997, Pages 631-634
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Hard a-C(N):H films obtained from plasma decomposition of methylamine-containing mixtures
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Author keywords
Amorphous hydrogenated carbon; Nitrogen; R.f. CVD; Structure
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Indexed keywords
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EID: 0002022465
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/s0925-9635(96)00749-2 Document Type: Article |
Times cited : (19)
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References (17)
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