Synthesis and characterization of C3N4 crystalline films on silicon

Journal of Physics Condensed Matter

Volumn 8, Issue 45, 1996, Pages

  Chen, Yan ^a   Guo, Liping ^a   Chen, Feng ^a   Wang, E G ^a  

^a INSTITUTE OF PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON INORGANIC COMPOUNDS; CHARACTERIZATION; CHEMICAL VAPOR DEPOSITION; COMPOSITION; LATTICE CONSTANTS; NITRIDES; SCANNING ELECTRON MICROSCOPY; SILICON; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY; X RAY ANALYSIS; X RAY CRYSTALLOGRAPHY;

CARBON NITRIDES; CRYSTALLINE FILMS; ENERGY DISPERSIVE X RAY ANALYSIS;

CRYSTALLINE MATERIALS;

EID: 0030569126     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/8/45/005     Document Type: Article

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