Composition of SiCN crystals consisting of a predominantly carbon-nitride network

Journal of Materials Research

Volumn 12, Issue 2, 1997, Pages 322-325

  Bhusari, D M ^a   Chen, C K ^b   Chen, K H ^a   Chuang, T J ^a   Chen, L C ^b   Lin, M C ^c  

^a INSTITUTE OF ATOMIC AND MOLECULAR SCIENCES   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c EMORY UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; COMPOSITION; CRYSTALS; SEMICONDUCTING SILICON COMPOUNDS; SYNTHESIS (CHEMICAL);

SILICON CARBON NITRIDE;

NITRIDES;

EID: 0031078373     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1997.0045     Document Type: Article

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