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Volumn 290-291, Issue , 1996, Pages 103-106

Investigation of carbon nitride films by cathodic arc evaporation

Author keywords

Carbon nitride films; Cathodic arcs

Indexed keywords

CARBON INORGANIC COMPOUNDS; CHEMICAL BONDS; ELECTRODEPOSITION; ELECTRON ENERGY LEVELS; ION BEAMS; NITROGEN; PRESSURE EFFECTS; THERMAL EFFECTS;

CARBON NITRIDE; CATHODIC ARC DEPOSITION;

AMORPHOUS FILMS;

EID: 0030401975 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(96)09067-0 Document Type: Article

Times cited : (37)

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