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Thin Solid Films

Volumn 290-291, Issue , 1996, Pages 99-102

The effect of annealing on the structure of cathodic arc deposited amorphous carbon nitride films

(2) McCulloch, D G a Merchant, A R a

a UNIVERSITY OF SYDNEY (Australia)

Author keywords

Amorphous materials; Annealing; Carbon nitride; Electron microscopy

Indexed keywords

CARBON NITRIDE; CATHODIC ARC DEPOSITION;

ANNEALING; CARBON INORGANIC COMPOUNDS; CHEMICAL BONDS; ELECTRODEPOSITION; ELECTRON ENERGY LEVELS; ELECTRON ENERGY LOSS SPECTROSCOPY; HIGH TEMPERATURE EFFECTS; NITROGEN; TRANSMISSION ELECTRON MICROSCOPY;

AMORPHOUS FILMS;

EID: 0005638529 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(96)09069-4 Document Type: Article

Times cited : (46)

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