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Volumn 25, Issue 5, 1997, Pages 301-314
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Study of the chemical composition and microstructure of ion beam-deposited CNx films including an XPS C 1s peak simulation
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMS;
COMPOSITION;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
ION BEAMS;
MICROSTRUCTURE;
MOLECULES;
NITROGEN;
SIMULATION;
X RAY PHOTOELECTRON SPECTROSCOPY;
CARBON NITRIDE FILM;
PHYSICAL VAPOR DEPOSITION;
THIN FILMS;
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EID: 0031139153
PISSN: 01422421
EISSN: None
Source Type: Journal
DOI: 10.1002/(SICI)1096-9918(199705)25:5<301::AID-SIA236>3.0.CO;2-A Document Type: Article |
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Times cited : (44)
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References (27)
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