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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 6, 1997, Pages 2983-2987

Characterization of carbon nitride produced by high-current vacuum arc deposition

(4) Hartmann, J a Siemroth, P b Schultrich, B b Rauschenbach, B a

a UNIVERSITY OF AUGSBURG (Germany)

b FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031526163 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.580893 Document Type: Article

Times cited : (26)

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