Deposition of carbon nitride via hot filament assisted CVD and pulsed laser deposition

Diamond and Related Materials

Volumn 6, Issue 12, 1997, Pages 1799-1805

  Johnson, D J ^a   Chen, Yan ^a   He, Yue ^a   Prince, R H ^a  

^a YORK UNIVERSITY   (Canada)

Author keywords

Carbon nitride; Hot filament assisted CVD; Pulsed laser deposition

Indexed keywords

EID: 0000960924     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(97)00142-8     Document Type: Article

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