Structure and mechanical properties of hard amorphous carbon-nitrogen films obtained by plasma decomposition of methane-ammonia mixtures

Thin Solid Films

Volumn 293, Issue 1-2, 1997, Pages 236-243

  Freire Jr , F L ^a   Franceschini, D F ^a  

^a PONTIFICAL CATHOLIC UNIVERSITY OF RIO DE JANEIRO   (Brazil)

Author keywords

Amorphous materials; Hard carbon; Nitrides; Plasma processing and deposition

Indexed keywords

AMMONIA; CARBON; COMPOSITION EFFECTS; HARDNESS; HYDROGENATION; ION BEAMS; METHANE; MIXTURES; NITRIDES; NITROGEN; PLASMA APPLICATIONS; RESIDUAL STRESSES;

HARD CARBON; PLASMA DECOMPOSITION;

AMORPHOUS FILMS;

EID: 0030647936     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)08979-1     Document Type: Article

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