Preparation of a novel target material for carbon nitride film deposition

Thin Solid Films

Volumn 308-309, Issue 1-4, 1997, Pages 126-129

  Lu, Tien Rong ^a   Kuo, Cheng Tzu ^a   Chen, Teng Ming ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Carbon nitride; UV photo assisted synthesis

Indexed keywords

DEPOSITION; GRAIN SIZE AND SHAPE; INFRARED SPECTROSCOPY; PHOTOSYNTHESIS; SCANNING ELECTRON MICROSCOPY; SINTERING; ULTRAVIOLET RADIATION; X RAY CRYSTALLOGRAPHY;

CARBON NITRIDE FILMS;

AMORPHOUS FILMS;

EID: 0031245818     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00418-5     Document Type: Article

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