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Diamond and Related Materials

Volumn 7, Issue 2-5, 1998, Pages 412-416

Raman spectroscopy of annealed carbon nitride films deposited by RF-magnetron sputtering

(3) Lacerda, M M a Freire Jr , F L a Mariotto, G b

a PONTIFICAL CATHOLIC UNIVERSITY OF RIO DE JANEIRO (Brazil)

b UNIVERSITY OF TRENTO (Italy)

Author keywords

Amorphous carbon; Annealing; Nitrogen; Raman spectroscopy

Indexed keywords

ANNEALING; CARBON; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY; THIN FILMS;

SILICON SUBSTRATES;

NITRIDES;

EID: 0031994423 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/s0925-9635(97)00230-6 Document Type: Article

Times cited : (28)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.