Carbon nitride films synthesized by the reactive ionized cluster beam technique

Journal of Physics D: Applied Physics

Volumn 31, Issue 4, 1998, Pages 363-367

  Lu, H W ^a   Zou, X R ^a   Xie, J Q ^a   Feng, J Y ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BEAMS; NITROGEN; PRESSURE EFFECTS; RAMAN SPECTROSCOPY; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE; REACTIVE IONIZED CLUSTER BEAM TECHNIQUE;

NITRIDES;

EID: 0031998968     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/31/4/004     Document Type: Article

References (24)

1. Liu A Y and Cohen M L 1989 Science 245 841
2. Teter D M and Hemley R J 1996 Science 271 53
3. Cote M and Cohen M L 1997 Phys. Rev. B 55 5684
4. Yu K M, Cohen M L, Haller E E, Hansen W L, Liu A Y and Wu I C 1994 Phys. Rev. B 49 5034
5. Bhusari D M, Chen C K, Chen K H, Chuang T J, Chen L C and Lin M C 1997 J. Mater. Res. 12 322
6. Wixom M K 1990 J. Am. Ceram. Soc. 73 1973
7. Lee D H, Lee H, Park B, Poker D B and Riester L 1997 Appl. Phys. Lett. 70 3104
8. Souto S and Alvarez F 1997 Appl. Phys. Lett. 70 1539
9. Enders B, Horino Y, Tsubouchi N, Chayahara A, Kinomura A and Fujii K 1997 Nucl. Instrum. Methods B 121 73
10. Mariotto G, Freire F L Jr and Achete C A 1994 Thin Solid Films 241 255
11. Fujimoto F and Ogata K 1993 Japan. J. Appl. Phys. 32 420
12. Hammer P, Baker M A, Lenardi C and Gissler W 1997 J. Vac. Sci. Technol. A 15 107
13. He X M, Shu L, Li W Z and Li H D 1997 J. Mater. Res. 12 1595
14. Chen-Y, Guo-L P and Wang-EG 1996 Mod. Phys. Lett. B 10 615
15. Takagi T, Yamada I, Kunori M and Kobiyama S 1972 Proc. 2nd Int. Conf. on Ion Sources, Vienna p 790
16. Kaufman J H, Metin S and Saperstein D D 1989 Phys. Rev. B 39 13053
17. Durrant S F, Marcal N, Castro S G, Vinhas R C G, Bica de Moraes M A and Nicola J H 1995 Thin Solid Films 259 139
18. Kumar S and Tansley TL 1993 Solid State Commun. 88 803
19. Knight D S and White W B 1989 J. Mater. Res. 4 385
20. Nemanich R J, Glass J T, Lucovsky G and Shroder R E 1988 J. Vac. Sci. Technol. A 6 1783
21. Xie J Q, Zheng Y and Feng JY 1997 Nucl Instrum. Methods B 122 239
22. Cuomo J J, Leary P A, Yu D, Reuter W and Frisch M 1979 J. Vac. Sci. Technol. A 16 299
23. Mizokawa Y, Miyasoto T, Nakamura S, Geib K M and Wilmsen C W 1988 J. Vac. Sci. Technol. A 5 2809
24. Marton D, Boyd K J, Al-Bayati A H, Todorov S S and Rabalais J W 1994 Phys. Rev. Lett. 73 118