Carbon nitride thin films formation by N+2 ion implantation

Vacuum

Volumn 48, Issue 7-9, 1997, Pages 709-713

  Palacio, C ^a   Gomez Aleixandre C ^b   Diaz D ^a   Garcia M M ^b  

^a UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

^b CSIC   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

BAND STRUCTURE; CARBON INORGANIC COMPOUNDS; CHEMICAL BONDS; DIAMONDS; FILM GROWTH; GRAPHITE; ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; NITROGEN; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

ANGLE RESOLVED X RAY PHOTOELECTRON SPECTROSCOPY (ARXPS); CARBON NITRIDE THIN FILMS;

NITRIDES;

EID: 0031224307     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(97)00036-5     Document Type: Article

References (16)

1. Liu, A. Y. and Cohen, M. L., Phys Rev, 1990, B41, 10727.
2. Niu, C., Lu, Y. Z. and Lieber, C. M., Science, 1993, 261, 334.
3. Boyd, K. J., Marton, D., Todorov, S. S., Al-Bayati, A. H., Kulik, J., Zuhr, R. A. and Rabalais, J. W., J Vac Sci Technol, 1995, A13, 2110.
4. Kola, P. V., Cameron, D. C., Meenan, B. J., Pischow, K. A., Anderson, C. A., Brown, N. M. D. and Hashmi, M. S. J., Surf Coating Technol, 1995, 74/75, 696.
5. Hoffman, A., Gouzman, I. and Brener, R., Appl Phys Lett, 1994, 64, 845.
6. Gouzman, I., Brener, R. and Hoffman, A., Surf Sci, 1995, 331/333, 283.
7. Taylor, J. A., Lancaster, G. M. and Rabalais, J. W., J Am Chem Soc, 1978, 10, 4441.
8. Dresselhaus, M. S. and Kalish, R., in Ion Implantation in Diamond, Graphite and Related Materials. Springer, Berlin (1992).
9. Taylor, J. A., Lancaster, G. M., Ignatiev, A. and Rabalais, J. W., J Chem Phys, 1978, 68, 1776.
10. Hasegawa, S. and Zalm, P. S., J Appl Phys, 1985, 58, 2539.
11. Palacio, C., Surf. Interface Anal. Submitted.
12. Shirley, D. A., Phys Rev, 1972, B5, 4709.
13. Palacio, C., Mathieu, H. J., Stambouli, V. and Landolt, D., Surf Sci, 1993, 295, 251.
14. Gelius, U., Heden, P. F., Hedman, J., Limberg, B. J., Manne, R., Nordberg, R., Nordling, R. and Siegbahn, K., Phys Scr, 1970, 2, 70.
15. Barber, M., Connor, J. A., Guest, M. F., Hillier, I. H., Schwartz, M. and Stacey, M., J Chem Soc Faraday Trans, 1973, 69, 551.
16. Nilson, A., Bjorneholm, O., Tillborg, H., Hernnas, B., Guest, R. J., Sandell, A., Palmer, R. E. and Mårtensson, N., Surf Sci, 1993, 287/288, 758.