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Applied Surface Science

Volumn 109-110, Issue , 1997, Pages 380-383

Carbon nitride films prepared by excimer laser ablation

(9) Gonzalez P a Soto, R a Parada, E G a Redondas, X a Chiussi, S a Serra, J a Pou, J a Leon B a Perez Amor M a

a UNIVERSITY OF VIGO (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; DEPOSITION; DISSOCIATION; ELLIPSOMETRY; EXCIMER LASERS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GRAPHITE; INFRARED SPECTROSCOPY; LASER ABLATION; RAMAN SPECTROSCOPY; SUBSTRATES; X RAY SPECTROSCOPY;

AMMONIA PHOTODISSOCIATION; CARBON NITRIDE FILMS; PROFILOMETRY;

THIN FILMS;

EID: 0031078471 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(96)00754-4 Document Type: Article

Times cited : (50)

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