Optical emission spectroscopy of the nitrogen arc in an arc-heated beam source used for synthesis of carbon nitride films

Journal of Physics D: Applied Physics

Volumn 30, Issue 9, 1997, Pages 1370-1376

  Xu, Ning ^a   Du, Yuancheng ^a   Ying, Zhifeng ^a   Ren, Zhongmin ^a   Li, Fuming ^a   Lin, Jing ^a   Ren, Yunzhu ^a   Zong, Xiangfu ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; AUGER ELECTRON SPECTROSCOPY; COMPOSITION; DEPOSITION; FILM GROWTH; FILMS; LIGHT SOURCES; NITRIDES; NITROGEN; PULSED LASER APPLICATIONS; SYNTHESIS (CHEMICAL); X RAY PHOTOELECTRON SPECTROSCOPY;

ARC HEATED BEAM SOURCE; CARBON NITRIDE; NITROGEN ARC;

LIGHT EMISSION;

EID: 0031557878     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/30/9/012     Document Type: Article

References (25)

1. Niu C, Lu Y Z and Liber CM 1993 Science 261 334
2. Ren Z, Du Y, Ying Z, Qiu Y, Xiong X, Wu J and Li F 1994 Appl. Phys. Lett. 65 1361
3. Yen T and Chou C 1995 Solid State Commun. 95 281
4. Altshulin S, Rosen A and Zzhavi J 1993 J. Mater. Sci. 28 3749
5. Park R M, Troffer M B, Rouleau C M, Depuydt J M and Haase M A 1990 Appl. Phys. Lett. 57 2127
6. Young W S, Rodgers W E and Knuth E L 1969 Rev. Sci. Instrum. 40 1346
7. Ferkel H, Feltgen R and Pikorz R 1991 Rev. Sci. Instrum. 62 2626
8. Liu S M, Rogers W E and Knuth E L 1974 J. Chem. Phys. 61 902
9. Way K R, Yang S C and Stwalley WC 1976 Rev. Sci. Instrum. 47 1049
10. Samano E C, Carr W E, Seidl M and Lee B S 1993 Rev. Sci. Instrum. 64 2746
11. Xu N, Du Y, Ying Z and Li F 1996 Appl. Phys. Lett. 69 1364
12. Vaudo R P, Cook J W and Schetzina J F 1994 J. Crystal Growth 138 430
13. Bickes R W, K. Newton K R, Herrmann J M and Bernstein R B 1976 J. Chem. Phys. 64 3648
14. Pearse R W B and Gay don AG 1963 The Identification of Molecular Spectra (New York: Wiley) pp 209-20
15. Reader J and Corliss CH 1980 Wavelength and Transition Probabilities for Atoms and Atomic Ions Parts I and II (Washington: NBS) p 101, 390
16. Moore C E 1980 Atomic Energy Levels vol I (Washington: NBS) p 32
17. Carlson T A 1975 Photoelectron and Auger Spectroscopy (New York: Plenum) p 225
18. Liu A Y and Cohen M L 1989 Science 245 841
19. Liu A Y and Cohen M L 1990 Phys. Rev. B 41 10727
20. Ogata K, Chubaci J F D and Fujimoto F 1994 J. Appl. Phys. 76 3791
21. Matsumoto O, Kotaki T, Shikano H, Takemura K and Tanaka S 1994 J. Electrochem. Soc. 141 L16
22. Marton D, Boyld K J, Albayati A H and Rabalais J W 1994 Phys. Rev. Lett. 73 118
23. Bousetta A, Lu M and Bensaoula A 1995 J. Vac. Sci. Technol. A 13 1639
24. Yu K M, Cohen M L, Haller E E, Hansen W L, Liu A M and Wu IC 1994 Phys. Rev. B 49 5034
25. Zhang Z J, Yang P and Lieber CM 1995 Mater. Res. Soc. Proc. 388 271