Role of nitrogen in the formation of hard and elastic (formula presented) thin films by reactive magnetron sputtering

Physical Review B - Condensed Matter and Materials Physics

Volumn 59, Issue 7, 1999, Pages 5162-5169

  Hellgren, Niklas ^a   Johansson, M ^a   Broitman, Esteban ^a   Hultman, Lars ^a   Sundgren, J ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343215213     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.59.5162     Document Type: Article

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