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Volumn 68, Issue 5, 1996, Pages 634-636
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Crystalline carbon nitride films formation by chemical vapor deposition
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0000619062
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.116492 Document Type: Article |
Times cited : (133)
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References (13)
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