Nitrogen doping of amorphous carbon thin films

Journal of Applied Physics

Volumn 84, Issue 4, 1998, Pages 2071-2081

  Schwan, J ^a,c   Batori, V ^a   Ulrich, S ^a   Ehrhardt, H ^a   Silva, S R P ^b  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

^b UNIVERSITY OF SURREY   (United Kingdom)

^c SAP RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000996948     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368268     Document Type: Article

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