Kinetic energy influence of hyperthermal dual ion beams on bonding and optical properties of carbon nitride films

Applied Physics Letters

Volumn 72, Issue 12, 1998, Pages 1412-1414

  Tsubouchi, N ^a   Horino, Y ^a   Enders, B ^a   Chayahara, A ^a   Kinomura, A ^a   Fujii, K ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; CHEMICAL BONDS; ION BEAMS; IONS; NITRIDES; NITROGEN; OPTICAL PROPERTIES; REFRACTIVE INDEX;

CARBON NITRIDE; HYPERTHERMAL DUAL ION BEAMS;

OPTICAL FILMS;

EID: 0032026664     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120580     Document Type: Article

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