X-ray diffraction studies of the effects of N incorporation in amorphous CNx materials

Journal of Applied Physics

Volumn 83, Issue 7, 1998, Pages 3529-3534

  Walters, J K ^a   Kuhn M ^b   Spaeth, C ^b   Dooryhee, E ^c   Newport, R J ^d  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^c EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^d UNIVERSITY OF KENT   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001693399     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366566     Document Type: Article

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