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Diamond and Related Materials

Volumn 6, Issue 5-7, 1997, Pages 626-630

Preparation of CNx films by ion beam assisted filtered cathodic arc deposition

(4) Spaeth, C a Kuhn M a Kreissig, U b Richter, F a

a CHEMNITZ UNIVERSITY OF TECHNOLOGY (Germany)

b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

Author keywords

C3n4; Elastic recoil detection; Ion assisted deposition; Raman spectroscopy

Indexed keywords

EID: 0000266019 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/s0925-9635(96)00621-8 Document Type: Article

Times cited : (39)

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